vanguard SONATA1000
High-precision additive nanofabrication of single-mode waveguides and freeform micro-optics
For further information reach out to our Customer Success Team at sales.vanguard@mycronic.com
- Industry-grade opto-mechanical design
- Suitable for processing of 12’’ wafers
- Vibration-isolated mainframe and housing
- Optical dispersion management system
- Suitable for use with silicon photonics, silicon nitride, indium phosphide, thin film lithium niobate and other material platforms
- Low loss coupling to surface and edge emitting photonic devices
- Compatible with single mode fibers, multi-core fibers and fiber arrays
- Scalable, cost-efficient production
- Industry-grade 780 nm laser with > 140 mW output power and 100 fs pulse
- Compatible with high-NA lithography objectives (NA 0.85 to 1.4)
- Write field of 400 µm × 340 µm for NA = 1.4
- Positioning stage with > 250 mm travel range (X,Y)
- High-speed, high-precision z-drive with a resolution of 20 nm
- Voxel positioning resolution better than 50 nm
- Marker detection accuracy < 100 nm
- 3D imaging capabilities
- Single sample to batch and wafer-level processing
- Customizable processing routines with full traceability
- Standard processes for photonic integration of standard optical components