vanguard REPRISE1000
Fully automated post processing tool for development and encapsulation
For further information reach out to our Customer Success Team at sales.vanguard@mycronic.com
- Industry-grade mechanical design with UV safety window
- Suitable for processing of 12’’ wafers.
- High-speed, high-precision XYZ-gantry system
- UV flood light unit and individual UV spotlight unit
- Nitrogen inlets for curing and drying
- Pressure regulated dispensing systems for material deposition and solvent cleaning
- External solvent and waste handling unit
- Includes separate oven
- Integrated cameras for part inspection and self-calibration routines
- Fill level sensors for leak detection
- XY gantry speed of 1 ms-1
- XY gantry system accuracy of 1 µm
- Z positioning accuracy of 100 nm
- Dispensing system accuracy of ± 50 µm for PWB encapsulation
- UV flood light bank intensity 0.5 W cm-2
- UV spotlight unit intensity 4 W cm-2
- Single sample to batch and wafer-level processing
- Customizable processing routines with full traceability
- Standard processes for photonic integration of standard optical components